Breakthrough in the synthesis technology of electronic grade diborane
2025-05-06
Electronic grade diborane, also known as electronic grade borane or electronic grade diborane, is a high-purity gas with broad application prospects in the semiconductor industry. Its molecular formula is B2H6. At room temperature, it is a colorless, toxic gas with a nauseating, suffocating odor. It is also very unstable, self-igniting in air and violently releasing hydrogen upon contact with water. Despite its reactive nature, electronic grade diborane plays an indispensable role in the semiconductor industry. It can be used as a "P"-type dopant source for silicon and germanium epitaxial growth, purification, diffusion, and ion implantation processes, making it a key material in semiconductor manufacturing.
However, the production technology of electronic grade diborane has long faced numerous challenges. A key issue is obtaining high-purity electronic grade diborane. Traditional synthesis methods often fail to meet the required purity standards, limiting the performance of the product in applications. Therefore, developing an efficient and reliable industrial synthesis technology for electronic grade diborane is particularly important.
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